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1

Piezoelectric properties of polycrystalline AlN thin films for MEMS application

K. Tonisch, V. Cimalla, Ch. Foerster, H. Romanus, O. Ambacher, D. Dontsov

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 427 KB

english, 2006

2

Graphene as an active virtually massless top electrode for RF solidly mounted bulk acoustic wave (SMR-BAW) resonators

Knapp, Marius, Hoffmann, René, Lebedev, Vadim, Cimalla, Volker, Ambacher, Oliver

Journal:

Year:

2018

Language:

english

File:

PDF, 2.26 MB

english, 2018

3

Wet chemical etching of AlN in KOH solution

I. Cimalla, Ch. Foerster, V. Cimalla, V. Lebedev, D. Cengher, O. Ambacher

Journal:

physica status solidi (c)

Year:

2006

Language:

english

File:

PDF, 328 KB

english, 2006

4

Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations

Heidrich, Nicola, Knöbber, Fabian, Polyakov, Vladimir, Cimalla, Volker, Pletschen, Wilfried, Sah, Ram Ekwal, Kirste, Lutz, Leopold, Steffen, Hampl, Stefan, Ambacher, Oliver, Lebedev, Vadim

Journal:

Sensors and Actuators A: Physical

Year:

2013

Language:

english

File:

PDF, 1.83 MB

english, 2013

5

Preparation of Conductive Tungsten Carbide Layers for SiC High Temperature Applications

Romanus, H., Cimalla, V., Ahmed, S. I., Schaefer, J. A., Ecke, G., Avci, R., Spiess, L.

Journal:

MRS Proceedings

Year:

1999

Language:

english

File:

PDF, 777 KB

english, 1999

6

Real time spectroscopic ellipsometry monitoring of the SiC growth during the interaction process of elemental carbon with Si surfaces

T. Wöhner, V. Cimalla, Th. Stauden, J.A. Schaefer, J. Pezoldt

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 306 KB

english, 2000

7

Tuning of Surface Properties of AlGaN/GaN Sensors for Nanodroplets and Picodroplets

Buchheim, C., Kittler, G., Cimalla, V., Lebedev, V., Fischer, M., Krischok, S., Yanev, V., Himmerlich, M., Ecke, G., Schaefer, J.A., Ambacher, O.

Journal:

IEEE Sensors Journal

Year:

2006

Language:

english

File:

PDF, 270 KB

english, 2006

8

Dependence of the photoreduction and oxidation behavior of indium oxide films on substrate temperature and film thickness

Bender, M., Katsarakis, N., Gagaoudakis, E., Hourdakis, E., Douloufakis, E., Cimalla, V., Kiriakidis, G.

Journal:

Journal of Applied Physics

Year:

2001

Language:

english

File:

PDF, 593 KB

english, 2001

9

CIP (cleaning-in-place) stability of AlGaN/GaN pH sensors

Linkohr, St., Pletschen, W., Schwarz, S.U., Anzt, J., Cimalla, V., Ambacher, O.

Journal:

Journal of Biotechnology

Year:

2013

Language:

english

File:

PDF, 1.26 MB

english, 2013

10

Chemical conversion of Si to SiC by solid source MBE and RTCVD

Pezoldt, J., Cimalla, V., Stauden, Th., Ecke, G., Eichhorn, G., Scharmann, F., Schipanski, D.

Journal:

Diamond and Related Materials

Year:

1997

Language:

english

File:

PDF, 1.32 MB

english, 1997

11

The deposition of aluminum nitride on silicon by plasma-enhanced metal-organic chemical vapour deposition

Stauden, Th., Eichhorn, G., Cimalla, V., Pezoldt, J., Ecke, G.

Journal:

Diamond and Related Materials

Year:

1996

Language:

english

File:

PDF, 305 KB

english, 1996

12

Optical characterization of MBE grown cubic and hexagonal SiC films on Si(111)

Werninghaus, T, Friedrich, M, Cimalla, V, Scheiner, J, Goldhahn, R, Zahn, D.R.T, Pezoldt, J

Journal:

Diamond and Related Materials

Year:

1998

Language:

english

File:

PDF, 1.10 MB

english, 1998

13

Catalyst-Free Growth of ZnO Nanowires Based on Topographical Confinement and Preferential Chemisorption and Their Use for Room Temperature CO Detection

Youn, Seul Ki, Ramgir, Niranjan, Wang, Chunyu, Subannajui, Kittitat, Cimalla, Volker, Zacharias, Margit

Journal:

The Journal of Physical Chemistry C

Year:

2010

Language:

english

File:

PDF, 4.81 MB

english, 2010

14

A Study of Hydrogen Sensing Performance of Pt–GaN Schottky Diodes

Ali, M., Cimalla, V., Lebedev, V., Tilak, V., Sandvik, P.M., Merfeld, D.W., Ambacher, O.

Journal:

IEEE Sensors Journal

Year:

2006

Language:

english

File:

PDF, 255 KB

english, 2006

15

Surface properties of stoichiometric and defect-rich indium oxide films grown by MOCVD

Himmerlich, M., Wang, Ch. Y., Cimalla, V., Ambacher, O., Krischok, S.

Journal:

Journal of Applied Physics

Year:

2012

Language:

english

File:

PDF, 4.15 MB

english, 2012

16

Growth mechanism and electronic properties of epitaxial In2O3 films on sapphire

Wang, Ch. Y., Kirste, L., Morales, F. M., Mánuel, J. M., Röhlig, C. C., Köhler, K., Cimalla, V., García, R., Ambacher, O.

Journal:

Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 1.77 MB

english, 2011

17

Performance Modification of SiC MEMS

Niebelschütz, Florentina, Brückner, Klemens, Cimalla, Volker, Hein, Matthias A., Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2009

Language:

english

File:

PDF, 1.94 MB

english, 2009

18

AIP Conference Proceedings [AIP 2010 WIDE BANDGAP CUBIC SEMICONDUCTORS: FROM GROWTH TO DEVICES: Proceedings of the E-MRS Symposium∗ F∗ - Strasbourg, (France) (8–10 October 2010)] - Diamond∕AlN Thin Films for Optical Applications

Knöbber, F., Bludau, O., Williams, O. A., Sah, R. E., Kirste, L., Baeumler, M., Leopold, S., Pätz, D., Nebel, C. E., Ambacher, O., Cimalla, V., Lebedev, V., Ferro, Gabriel, Siffert, Paul

Year:

2010

Language:

english

File:

PDF, 651 KB

english, 2010

19

SPIE Proceedings [SPIE BiOS - San Francisco, California (Saturday 23 January 2010)] Optical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XIV - Minimal invasive localization of the germinal disc in ovo for subsequent chicken sexing using optical coherence tomography

Burkhardt, Anke, Izatt, Joseph A., Fujimoto, James G., Geissler, Stefan, Cimalla, Peter, Tuchin, Valery V., Walther, Julia, Koch, Edmund

Year:

2010

Language:

english

File:

PDF, 451 KB

english, 2010

20

SPIE Proceedings [SPIE SPIE BiOS - San Francisco, California, USA (Saturday 22 January 2011)] Optical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XV - Three-dimensional functional imaging of lung parenchyma using optical coherence tomography combined with confocal fluorescence microscopy

Gaertner, Maria, Fujimoto, James G., Izatt, Joseph A., Cimalla, Peter, Knels, Lilla, Tuchin, Valery V., Meissner, Sven, Koch, Edmund

Year:

2011

Language:

english

File:

PDF, 932 KB

english, 2011

21

Potassium tantalate-niobate mixed crystal thin films for applications in nonlinear integrated optics

Jia, Yuechen, Szabados, Jan, Winkler, Markus, Breunig, Ingo, Cimalla, Volker, Kirste, Lutz, Žukauskaitė, Agnė, Buse, Karsten

Journal:

Journal of Physics Conference Series

Year:

2017

Language:

english

File:

PDF, 501 KB

english, 2017

22

Transfer of AlGaN/GaN RF-devices onto diamond substrates via van der Waals bonding

Gerrer, Thomas, Cimalla, Volker, Waltereit, Patrick, Müller, Stefan, Benkhelifa, Fouad, Maier, Thomas, Czap, Heiko, Ambacher, Oliver, Quay, Rüdiger

Journal:

International Journal of Microwave and Wireless Technologies

Year:

2018

Language:

english

File:

PDF, 569 KB

english, 2018

23

Wettability Investigations and Wet Transfer Enhancement of Large-Area CVD-Graphene on Aluminum Nitride

Knapp, Marius, Hoffmann, René, Cimalla, Volker, Ambacher, Oliver

Journal:

Year:

2017

Language:

english

File:

PDF, 21.98 MB

english, 2017

24

Reflectance Difference Spectroscopy Characterization of AlxGa1—xN-Compound Layers

U. Rossow, D.E. Aspnes, O. Ambacher, V. Cimalla, N.V. Edwards, M. Bremser, R.F. Davis, J.A. Schaefer, M. Stutzmann

Journal:

physica status solidi (b)

Year:

1999

Language:

english

File:

PDF, 174 KB

english, 1999

25

Ozone Sensing Properties of Polycrystalline Indium Oxide Films at Room Temperature

G. Kiriakidis, M. Bender, N. Katsarakis, E. Gagaoudakis, E. Hourdakis, E. Douloufakis, V. Cimalla

Journal:

physica status solidi (a)

Year:

2001

Language:

english

File:

PDF, 94 KB

english, 2001

26

The Influence of Surface Preparation on the Properties of SiC on Si(111)

J. Pezoldt, B. Schröter, V. Cimalla, P. Masri

Journal:

physica status solidi (a)

Year:

2001

Language:

english

File:

PDF, 126 KB

english, 2001

27

Effects of the Sapphire Nitridation on the Polarity and Structural Properties of GaN Layers Grown by Plasma-Assisted MBE

A. Georgakilas, S. Mikroulis, V. Cimalla, M. Zervos, A. Kostopoulos, Ph. Komninou, Th. Kehagias, Th. Karakostas

Journal:

physica status solidi (a)

Year:

2001

Language:

english

File:

PDF, 112 KB

english, 2001

28

Impact of Device Technology Processes on the Surface Properties and Biocompatibility of Group III Nitride Based Sensors

I. Cimalla, F. Will, K. Tonisch, M. Niebelschütz, V. Cimalla, V. Lebedev, G. Kittler, M. Himmerlich, S. Krischok, J. A. Schaefer, M. Gebinoga, A. Schober, T. Friedrich, O. Ambacher

Journal:

Materialwissenschaft und Werkstofftechnik

Year:

2006

Language:

english

File:

PDF, 231 KB

english, 2006

29

Origin of n-type conductivity in nominally undoped InN

V. Cimalla, V. Lebedev, F. M. Morales, M. Niebelschütz, G. Ecke, R. Goldhahn, O. Ambacher

Journal:

Materialwissenschaft und Werkstofftechnik

Year:

2006

Language:

english

File:

PDF, 173 KB

english, 2006

30

Tuning of electrical properties of InxOy thin films grown by MOCVD for different applications

Ch. Y. Wang, V. Cimalla, O. Ambacher

Journal:

Materialwissenschaft und Werkstofftechnik

Year:

2006

Language:

english

File:

PDF, 65 KB

english, 2006

31

Austrittsarbeitsanalyse von GaN basierten Lateral Polarity Strukturen durch Auger-Elektronen-Energie-Messungen

M. Niebelschütz, G. Ecke, V. Cimalla, K. Tonisch, O. Ambacher

Journal:

Materialwissenschaft und Werkstofftechnik

Year:

2006

File:

PDF, 166 KB

2006

32

Markers prepared by focus ion beam technique for nanopositioning procedures

H. Romanus, J. Schadewald, V. Cimalla, M. Niebelschütz, T. Machleidt, K.-H. Franke, L. Spiess, O. Ambacher

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 1.11 MB

english, 2007

33

Carbon surface diffusion and SiC nanocluster self-ordering

J. Pezoldt, Yu.V. Trushin, V.S. Kharlamov, A.A. Schmidt, V. Cimalla, O. Ambacher

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2006

Language:

english

File:

PDF, 380 KB

english, 2006

34

Highly efficient THz emission from differently grown InN at 800 nm and 1060 nm excitation

G. Matthäus, V. Cimalla, B. Pradarutti, S. Riehemann, G. Notni, V. Lebedev, O. Ambacher, S. Nolte, A. Tünnermann

Journal:

Optics Communications

Year:

2008

Language:

english

File:

PDF, 301 KB

english, 2008

35

Growth of thin β-SiC layers by carbonization of Si surfaces by rapid thermal processing

V. Cimalla, K.V. Karagodina, J. Pezoldt, G. Eichhorn

Journal:

Materials Science and Engineering: B

Year:

1995

Language:

english

File:

PDF, 611 KB

english, 1995

36

Determination of the composition of InxGa1−xN from strain measurements

F.M. Morales, D. González, J.G. Lozano, R. García, S. Hauguth-Frank, V. Lebedev, V. Cimalla, O. Ambacher

Journal:

Acta Materialia

Year:

2009

Language:

english

File:

PDF, 709 KB

english, 2009

37

Effect of island coalescence on structural and electrical properties of InN thin films

V. Lebedev, V. Cimalla, F.M. Morales, J.G. Lozano, D. González, Ch. Mauder, O. Ambacher

Journal:

Journal of Crystal Growth

Year:

2007

Language:

english

File:

PDF, 1.21 MB

english, 2007

38

Micro-electromechanical systems based on 3C-SiC/Si heterostructures

Ch. Förster, V. Cimalla, K. Brückner, M. Hein, J. Pezoldt, O. Ambacher

Journal:

Materials Science and Engineering: C

Year:

2005

Language:

english

File:

PDF, 513 KB

english, 2005

39

Nanowire-based electromechanical biomimetic sensor

K. Tonisch, V. Cimalla, F. Will, F. Weise, M. Stubenrauch, A. Albrecht, M. Hoffmann, O. Ambacher

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2007

Language:

english

File:

PDF, 548 KB

english, 2007

40

Electrical performance of gallium nitride nanocolumns

M. Niebelschütz, V. Cimalla, O. Ambacher, T. Machleidt, J. Ristic, E. Calleja

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2007

Language:

english

File:

PDF, 394 KB

english, 2007

41

Growth of silicon nanowires on UV-structurable glass using self-organized nucleation centres

K. Tonisch, F. Weise, M. Stubenrauch, V. Cimalla, G. Ecke, F. Will, H. Romanus, S. Mrotzek, H. Hofmeister, M. Hoffmann, D. Hülsenberg, O. Ambacher

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2007

Language:

english

File:

PDF, 701 KB

english, 2007

42

Pt/GaN Schottky diodes for hydrogen gas sensors

M. Ali, V. Cimalla, V. Lebedev, H. Romanus, V. Tilak, D. Merfeld, P. Sandvik, O. Ambacher

Journal:

Sensors and Actuators B: Chemical

Year:

2006

Language:

english

File:

PDF, 590 KB

english, 2006

43

Reactively sputtered InxVyOz films for detection of NOx, D2, and O2

M. Ali, V. Cimalla, V. Lebedev, Th. Stauden, Ch. Wang, G. Ecke, V. Tilak, P. Sandvik, O. Ambacher

Journal:

Sensors and Actuators B: Chemical

Year:

2007

Language:

english

File:

PDF, 213 KB

english, 2007

44

AlGaN/GaN biosensor—effect of device processing steps on the surface properties and biocompatibility

I. Cimalla, F. Will, K. Tonisch, M. Niebelschütz, V. Cimalla, V. Lebedev, G. Kittler, M. Himmerlich, S. Krischok, J.A. Schaefer, M. Gebinoga, A. Schober, T. Friedrich, O. Ambacher

Journal:

Sensors and Actuators B: Chemical

Year:

2007

Language:

english

File:

PDF, 845 KB

english, 2007

45

Nanoelectromechanical devices for sensing applications

V. Cimalla, F. Niebelschütz, K. Tonisch, Ch. Foerster, K. Brueckner, I. Cimalla, T. Friedrich, J. Pezoldt, R. Stephan, M. Hein, O. Ambacher

Journal:

Sensors and Actuators B: Chemical

Year:

2007

Language:

english

File:

PDF, 1.73 MB

english, 2007

46

NOx sensing properties of In2O3 nanoparticles prepared by metal organic chemical vapor deposition

Ch.Y. Wang, M. Ali, Th. Kups, C.-C. Röhlig, V. Cimalla, Th. Stauden, O. Ambacher

Journal:

Sensors and Actuators B: Chemical

Year:

2008

Language:

english

File:

PDF, 491 KB

english, 2008

47

Photon stimulated sensor based on indium oxide nanoparticles I: Wide-concentration-range ozone monitoring in air

Ch.Y. Wang, R.W. Becker, T. Passow, W. Pletschen, K. Köhler, V. Cimalla, O. Ambacher

Journal:

Sensors and Actuators B: Chemical

Year:

2011

Language:

english

File:

PDF, 847 KB

english, 2011

48

Self-organized SiC nanostructures on silicon

V. Cimalla, A.A. Schmidt, Ch. Foerster, K. Zekentes, O. Ambacher, J. Pezoldt

Journal:

Superlattices and Microstructures

Year:

2004

Language:

english

File:

PDF, 460 KB

english, 2004

49

Anisotropy of the dielectric function for wurtzite InN

R. Goldhahn, A.T. Winzer, V. Cimalla, O. Ambacher, C. Cobet, W. Richter, N. Esser, J. Furthmüller, F. Bechstedt, H. Lu, W.J. Schaff

Journal:

Superlattices and Microstructures

Year:

2004

Language:

english

File:

PDF, 109 KB

english, 2004

50

Cubic InN on -plane sapphire

V. Cimalla, U. Kaiser, I. Cimalla, G. Ecke, J. Pezoldt, L. Spiess, O. Ambacher, H. Lu, W. Schaff

Journal:

Superlattices and Microstructures

Year:

2004

Language:

english

File:

PDF, 1.36 MB

english, 2004